This dataset contains experimental data as a characterisation of piezoelectric micropumps and microvalves. Measurement data includes the actuator stroke measured using white light profilometry, as well as fluidic measurements of generated flow, passive flow, and leakage measured using coriflow flowmeters. Flow measurement data of normally open valves before and after 10^6 actuation cycles is supplied. An ANSYS 2019 R1 project file is given as part of an evaluation of a normally closed valve's spring foil. Associated with the simulation is experimental data of the pressure-dependant stroke of the normally closed valve's spring foil.
The dataset contains .dat files for fluidic measurements; .txt files for stroke measurements; and an ANSYS 2019 R1 project file. Data of micropumps, NO microvalves, NC microvalves, and simulation files are collected in separate zip folders, respectively. The tabular data can be evaluated using EXCEL or Python. Simulation data can be used with ANSYS Version 2019 R1 or higher.